Vacuum Chuck 4" Dia. For 4" Wafer and less
Chuck Up/Down: 0-4mm with adjustable limits.
Coaxial Stage X-Y 4" -4"
Platen 480(W) X 330mm (D) platen cutout = 205mm(W)X 250mm(D)
Vacuum Source -250mmHg Required o Chuck Stage Resolution: 10 urn o Chuck Quick Motion: 25 mm ' Chuck Up/Down Quick Z -
Motion: 4mm o Chuck Z-Resolution: 1 urn o Chuck Theta: 150 backlash-free o Microscope Stage X-Y 2" X2"
I need this equipment and price with quotation.